Tantalum pentoxide Ta2O5

Ta2O5 · CAS 1314-61-0 · hexagonal d phase

Tantalum pentoxide (Ta2O5) is a dense oxide of tantalum.

8 sources · Updated 2026-11-01 · CC BY 4.0

Evidence level

2 of 5

Lab-measured

Density

8.2 g/cm³

Melting point

1872 °C

Refractive index

2.1 -

Dielectric constant

29.2 to 29.5 -

Formula mass

441.9 g/mol

Recipe, share of the weight

  • Ta 81.897%Tantalum
  • O the balance of the mass (no source prints the oxygen share)Oxygen

Best for

High-index optical coatings and thin high-permittivity dielectric layers (the supplier lists a refractive index of 2.1 at 500 nm; NIST quotes a dielectric constant of 29.2 to 29.5 for amorphous films)

Weakest at

Electrical stability under bias and heat, where oxygen vacancies move through the film and leakage rises (NASA study of tantalum capacitors)

Risk at a glance

  • People None found. Not classified as hazardous
  • If it fails Moderate. Leakage-current rise in a tantalum capacitor dielectric
  • Corrosion Moderate. Leakage rises as oxygen vacancies move through the Ta2O5 layer under bias and heat.

Quick facts: Ta2O5

Key properties of Ta2O5
PropertyValueBasis
Density5.08 to 8.7 g/cm³4 sourced values across conditions
Melting point1,872 °C1 sourced value

What is the density of Tantalum pentoxide (Ta2O5)?

Tantalum pentoxide (Ta2O5) has a density of 5.08 to 8.7 g/cm³. The range covers 4 sourced values across the tempers, forms and test conditions the sources report; room-temperature values are used where a source states a temperature.

What is the melting point of Tantalum pentoxide (Ta2O5)?

Tantalum pentoxide (Ta2O5) has a melting point of 1,872 °C. The source and test conditions are listed in the properties table on this page.

What is Tantalum pentoxide (Ta2O5) used for?

Uses recorded in the sources include High-index thin-film optical coating; Tantalum capacitor dielectric (anodic Ta2O5 layer); High-K dielectric for DRAM storage capacitors (proposed).

Why it exists

Tantalum pentoxide (Ta2O5) is an oxide of tantalum. It is used in two places: as a thin high-index coating in optics, and as the insulating layer inside tantalum capacitors. A high-index material bends light more strongly than a low-index one, which lets a coating designer reach a given optical effect with thinner layers. In a capacitor the dielectric constant, the measure of how much charge an insulator stores per unit field, sets how much capacitance a thin layer can give.

Where it's used

Optical coatings

The supplier describes Ta2O5 as a high-index coating material with transmission from the near ultraviolet into the infrared. It is evaporated from tablets with an electron beam.

Tantalum capacitors

NASA's study of tantalum chip capacitors names the Ta2O5 layer as the dielectric, and the failure mechanisms it describes all involve that layer.

DRAM chips

NIST's 2001 abstract describes tantalum pentoxide as one of the new high-K materials needed for dynamic random access memory chips.

Recipe

Ta2O5

Ta2O5 has two tantalum atoms and five oxygen atoms per formula unit. The supplier's formula is written Ta2O5 and the CAS number is 1314-61-0.

What Ta2O5 is made of
IngredientShare of the weightWhat it does
Tantalum Ta 81.897% The metal that forms the oxide. Its formula is written Ta2O5 in the supplier's identifiers.
Oxygen O the balance of the mass (no source prints the oxygen share) Oxygen makes up the rest of the formula unit. NASA links oxygen vacancies in this oxide to capacitor leakage.

Weight shares are as printed in the sources.

What it can do

Density

8.2 g/cm³

measured

The supplier's safety data sheet gives 8.2 g/cm3 at 25 °C. NIST's abstract quotes a tabulated bulk value of 8.7 g/cm3. The sources differ, so the film density should be checked for the film in use.

Melting point

1872 °C

measured

The supplier gives a melting point of 1872 °C. Its electron-beam evaporation temperature is 1,950 °C.

Refractive index

2.1 -

measured

The supplier lists a refractive index of 2.1 at 500 nm for the coating material.

Dielectric constant

29.2 to 29.5 -

measured

NIST's abstract gives 29.2 to 29.5 for amorphous films and 45.6 to 51.7 for crystalline films, both from earlier work.

Formula mass

441.9 g/mol

worked out from the formula

The formula mass is 441.89 g/mol, as printed in the supplier safety data sheet.

How it compares

Ta2O5 is a high-index oxide. Its supplier gives a refractive index of 2.1 at 500 nm, and NIST's abstract gives dielectric constants of 29.2 to 29.5 for amorphous films and 45.6 to 51.7 for crystalline films. The sources read here do not rank Ta2O5 against other oxides, so the table below shows only its own density, melting point and refractive index.

The same measurements for each material, so you can compare them. Each row names the key condition under the value; the full conditions and methods are in the numbered notes under Technical details. Other materials are shown beside it; each was measured under its own conditions, so open its page before comparing closely. Compare every grade in the family.

Benchmarks
MeasurementTa2O5Al2O3BaTiO3BeOCaTiO3RCFCeO2CoO and Co3O4CuO, Cu2OHfO2Fe2O3, Fe3O4LSMPZTMgONiONb2O5Al2Si4O10(OH)2Ln2O3SiOMgO-SiO2SnO2, ITOTiO2WO3V2O5Y2O3ZnOMg-PSZ, ATZ, ZTAYSZ
Thermal behavior and safety
Melting point (supplier product specification)1872 °C52030 to 2072 °C1625 °C2578 °C1975 °C1760 °C2600 °C1830 °C1326 °C2774 °Cno data> 1650 °Cno data2800 °C1984 °C1500 °Cno data2304 °C1702 °Cno data1630 °C1850 °C1472 °C690 °C2410 °C1975 °Cno datano data
Evaporation temperature (electron-beam source)1950 °C6no datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano data
Physical and electrical
Density at 25 °C (supplier safety data sheet)Value printed in the supplier safety data sheet8.2 g/cm³13.72 g/cm³6.08 -3.01 g/cu cm4.1 g/cc64 kg/m37.65 g/cm³6.45 g/cm³6 -9.68 g/cc5.24 g/cm³2 g/cm³7.8 g/cm³3.58 g/cm³6.67 g/cm³4.6 g/cm³2.3 g/cc6.51 g/cm³2.13 g/cc2.8 g/cm³6.95 g/mL4 g/cm³7.2 g/cm³3.4 -> 4.9 g/cm³5.67 g/cm³5.72 g/cm³6.02 g/cm³
Density (supplier product specification)8.2 g/cm³23.72 g/cm³6.08 -3.01 g/cu cm4.1 g/cc64 kg/m37.65 g/cm³6.45 g/cm³6 -9.68 g/cc5.24 g/cm³2 g/cm³7.8 g/cm³3.58 g/cm³6.67 g/cm³4.6 g/cm³2.3 g/cc6.51 g/cm³2.13 g/cc2.8 g/cm³6.95 g/mL4 g/cm³7.2 g/cm³3.4 -> 4.9 g/cm³5.67 g/cm³5.72 g/cm³6.02 g/cm³
Tabulated bulk density (NIST abstract)8.7 g/cm³33.72 g/cm³6.08 -3.01 g/cu cm4.1 g/cc64 kg/m37.65 g/cm³6.45 g/cm³6 -9.68 g/cc5.24 g/cm³2 g/cm³7.8 g/cm³3.58 g/cm³6.67 g/cm³4.6 g/cm³2.3 g/cc6.51 g/cm³2.13 g/cc2.8 g/cm³6.95 g/mL4 g/cm³7.2 g/cm³3.4 -> 4.9 g/cm³5.67 g/cm³5.72 g/cm³6.02 g/cm³
Theoretical density, hexagonal d phase (CVD)Theoretical value quoted in the NIST abstract8.316 g/cm³3.72 g/cm³6.08 -3.01 g/cu cm4.1 g/cc64 kg/m37.65 g/cm³6.45 g/cm³6 -9.68 g/cc5.24 g/cm³2 g/cm³7.8 g/cm³3.58 g/cm³6.67 g/cm³4.6 g/cm³2.3 g/cc6.51 g/cm³2.13 g/cc2.8 g/cm³6.95 g/mL4 g/cm³7.2 g/cm³3.4 -> 4.9 g/cm³5.67 g/cm³5.72 g/cm³6.02 g/cm³
Measured density of low-value thin films5.08 to 6.31 g/cm³43.72 g/cm³6.08 -3.01 g/cu cm4.1 g/cc64 kg/m37.65 g/cm³6.45 g/cm³6 -9.68 g/cc5.24 g/cm³2 g/cm³7.8 g/cm³3.58 g/cm³6.67 g/cm³4.6 g/cm³2.3 g/cc6.51 g/cm³2.13 g/cc2.8 g/cm³6.95 g/mL4 g/cm³7.2 g/cm³3.4 -> 4.9 g/cm³5.67 g/cm³5.72 g/cm³6.02 g/cm³
Other measurements
Refractive index of the coating material2.1 -7no data2.416 -1.719 -no datano datano datano datano datano datano datano datano data1.708 -no data2.091 -no data1.93 -no datano datano datano datano datano data1.92 -no datano datano data
Dielectric constant, amorphous thin films29.2 to 29.5 -89.7 -3000 -no data146 -no datano datano datano data22 to 25 -no datano data1800 -9.65 -no datano data2 to 4 -no datano data6 -no datano datano datano datano data8.75 -28 -29 -
Dielectric constant, crystalline thin films45.6 to 51.7 -99.7 -3000 -no data146 -no datano datano datano data22 to 25 -no datano data1800 -9.65 -no datano data2 to 4 -no datano data6 -no datano datano datano datano data8.75 -28 -29 -
Formula massValue printed in the supplier safety data sheet441.9 g/molno datano datano datano datano data172.1 g/molno datano datano datano datano datano datano datano data265.8 g/molno datano datano datano datano datano datano data181.9 g/molno datano datano datano data
Oral LD50, rat8000 mg/kg10no datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano data> 20000 mg/kgno datano datano datano datano datano datano data

Why choose it, and why not

Good for

  • High-index optical coatings where a refractive index of 2.1 at 500 nm is needed (supplier product specification).
  • Thin high-permittivity dielectric layers. NIST quotes 29.2 to 29.5 for amorphous films.

Watch out for

  • Leakage rises with bias and heat as oxygen vacancies move in the film (NASA study of tantalum capacitors).
  • Film density depends on the process. NIST measured 5.08 to 6.31 g/cm3 in thin films, against a tabulated bulk value of 8.7 g/cm3.
  • The supplier and NIST density figures differ (8.2 and 8.7 g/cm3), so check the source for the film you use.

Ta2O5 is a dense, high-index oxide that its safety data sheet does not classify as hazardous. In the sources read, the main limit is electrical ageing under stress, not handling.

Technical details

For scientists and researchers. Everything above comes from the record below: every number with its method, its conditions and its source.

Notes

The method, full conditions and any caveat for the numbered rows above.

Notes for the numbered rows
#MeasurementMethodConditionsCaveat
1Density at 25 °C (supplier safety data sheet)—form powdertemperature 25 °Cprinted 8.2 g/cm3 at 25ºC (77ºF)—
2Density (supplier product specification)Value printed on the supplier product page, Product Specifications tabform powder or tablet, as soldprinted 8.2 g/cm³—
3Tabulated bulk density (NIST abstract)Value quoted in the abstract of a NIST paper on thin films; the paper does not measure bulk densitybasis tabulated bulk value, printed in the abstract as approximately equal to 8.7 g/cm3form bulkThe supplier gives 8.2 g/cm3 and NIST's tabulated bulk value is 8.7 g/cm3. The two sources differ and both are kept.
4Measured density of low-value thin filmsRange quoted in the NIST abstract; the abstract does not say which film gave which valueform thin films 2 nm to 8 nm thick, grown under different process conditionsbasis grazing incidence X-ray reflectivity, per the abstract—
5Melting point (supplier product specification)Value printed on the supplier product page, Product Specifications tabform as sold, purity 99.99printed 1,872°C—
6Evaporation temperature (electron-beam source)Value printed on the supplier product page as the evaporation temperaturemethod electron-beam evaporation from tablets with a tantalum or graphite linerprinted 1,950ºC—
7Refractive index of the coating materialValue printed on the supplier product page, Product Specifications tabwavelength 500 nmprinted 2.1 at 500nmThe same page's Applications text prints "< 2" with no wavelength. The two statements are not reconciled.
8Dielectric constant, amorphous thin filmsRange quoted in the NIST abstract; relative permittivity is dimensionless, so no unit is printedform amorphous thin filmsbasis range quoted in the abstract from earlier work—
9Dielectric constant, crystalline thin filmsRange quoted in the NIST abstract; relative permittivity is dimensionless, so no unit is printedform crystalline thin filmsbasis range quoted in the abstract from earlier work—
10Oral LD50, ratValue printed in the supplier safety data sheet, toxicological informationspecies ratroute oralprinted 8,000mg/kg—

Corrosion and compatibility

What happens when it meets other materials and environments.

Corrosion and compatibility
EnvironmentConcernWhat happens
Water and strong oxidizing agents low Insoluble in water, and it reacts with strong oxidizing agents.1
Electrical stress: the oxide under bias and heat in a tantalum capacitor moderate Leakage rises as oxygen vacancies move through the Ta2O5 layer under bias and heat.2
Corrosion details
#EnvironmentDetailsTest conditions
1 Water and strong oxidizing agents The supplier safety data sheet prints Water Solubility as 'Insoluble in water', says the material is 'Stable under recommended storage conditions', and lists 'Strong Oxidizing Agents' as the material it reacts with. basis supplier safety data sheet statements; no corrosion-rate test is printed
2 Electrical stress: the oxide under bias and heat in a tantalum capacitor NASA's study of chip tantalum capacitors ties the leakage rise to migration of positively charged oxygen vacancies in the Ta2O5 dielectric, which lowers the barrier at the MnO2/Ta2O5 interface. The paper reports that baking substantially reduced the leakage currents in its tests. basis accelerated life tests of tantalum chip capacitors at several temperatures and voltagestest highly accelerated life testing (HALT)

Risks and side effects

Hazards to people, what happens when a cell overheats, and how the material is handled and stored.

For people

The supplier safety data sheet and PubChem both report no GHS hazard classification, though the toxicity data are thin.

Supplier SDS
The SDS prints 'Signal Word: Not a Hazardous Substance or Mixture' and 'Hazard Statements: N/A'. It also prints 'Oral Rat LD50: 8,000mg/kg'.
PubChem
PubChem notes that 'This chemical does not meet GHS hazard criteria for 97.5% (78 of 80) of all reports.'
Dust
The SDS lists 'OSHA PEL 5.0 mg/m3' and 'NIOSH STEL 10.0 mg/m3' for tantalum metal and oxide dust, so dust control still applies.

If a capacitor ages under stress

These results come from accelerated life tests of tantalum chip capacitors, not from field failures.

Mechanism
NASA's study ties the leakage rise to oxygen vacancies moving through the Ta2O5 dielectric under bias and heat.
Recovery
The same study reports that baking substantially reduced the leakage currents in its tests.

Test details
The original wording and numbers from the sources, for readers who want them.

Failure risks

Failure risks
FailureTrigger and consequence
Leakage-current rise in a tantalum capacitor dielectricmoderate severityOperation under bias at elevated temperature, tested by highly accelerated life testing (HALT)Oxygen vacancies migrate in the Ta2O5 dielectric. NASA describes two failure types: a sudden leakage jump that indicates breakdown, and a gradual current rise that causes parametric failure.
Oxygen loss during evaporation heat-uplow severityRapid heating of tablets in an electron-beam evaporatorThe supplier notes that oxides which lose oxygen during heat-up need preconditioning, a slow e-beam sweep that controls melting and oxygen loss.

Handling and storage

  • Keep the container tightly closed in a dry and well-ventilated place. Provide exhaust ventilation where dust forms; in case of insufficient ventilation, wear suitable respiratory equipment.
  • Incompatible with 'Strong Oxidizing Agents' (the SDS says the material reacts with them).

Mitigations

  • Preconditioning with a slow sweep of the electron beam over the tablets so that melting and loss of oxygen is controlled. The supplier also prints '0.5nm/sec is a typical deposition rate for good crystallinity at a 300°C substrate temperature.'

Supply and geography

How common the raw materials are and where they come from.

Tantalum (feedstock for Ta2O5)

Top producers (2025)
Congo (Kinshasa) 52%, Rwanda 16%, Nigeria 15.6%, Brazil 7.6%, China 3.2%
Critical mineral lists
US: listed, EU: listed
Recycling
USGS: tantalum was recycled mostly from new scrap, and the amount recycled 'was not available, but it may account for as much as 30% of consumption by domestic primary processors'.
Substitutes
USGS: niobium and tungsten in carbides, and aluminum, ceramics and niobium in electronic capacitors, can substitute for tantalum, with performance loss or higher costs.

Updated