Beryllium oxide BeO

BeO (beryllium oxide) · CAS 1304-56-9 · hexagonal, P6_3mc

Also known as CAS 1304-56-9, Beryllium oxide, Beryllia, Thermalox 995

Beryllium oxide (BeO, beryllia) is an oxide ceramic that conducts heat better than almost any electrical insulator, second only to diamond according to Materion.

8 sources · Updated 2026-10-26 · CC BY 4.0

Evidence level

2 of 5

Lab-measured

Carry heat away

285 W/m°K

Stay strong

221 Mpa

Recipe, share of the weight

  • Be 36.0%Beryllium
  • O 64.0%Oxygen

Best for

Heat spreaders and packages that must move a lot of heat while staying electrically insulating, where the beryllium dust hazard can be controlled

Weakest at

Health: beryllium dust, fume and mist are toxic and carcinogenic by inhalation. Mechanical strength is lower than alumina according to the American Beryllia page

Risk at a glance

  • People No data. No hazard data recorded
  • If it fails High. Airborne beryllium from machining or crushing fired parts
  • Corrosion Severe. Soluble in hot strong acid and fused alkali

Quick facts: BeO

Key properties of BeO
PropertyValueBasis
Density3.01 g/cm³3 sourced values across conditions
Thermal conductivity285 W/(m·K)2 sourced values across conditions
Melting point2,578 °C1 sourced value

What is the density of Beryllium oxide (BeO)?

Beryllium oxide (BeO) has a density of 3.01 g/cm³. The range covers 3 sourced values across the tempers, forms and test conditions the sources report; room-temperature values are used where a source states a temperature.

What is the thermal conductivity of Beryllium oxide (BeO)?

Beryllium oxide (BeO) has a thermal conductivity of 285 W/(m·K). The range covers 2 sourced values across the tempers, forms and test conditions the sources report; room-temperature values are used where a source states a temperature.

What is the melting point of Beryllium oxide (BeO)?

Beryllium oxide (BeO) has a melting point of 2,578 °C. The source and test conditions are listed in the properties table on this page.

What are the other names and codes for Beryllium oxide (BeO)?

Beryllium oxide (BeO) is also written as CAS 1304-56-9, Beryllium oxide, Beryllia, Thermalox 995. Each code is printed in the source listed beside it in the designations table.

What is Beryllium oxide (BeO) used for?

Uses recorded in the sources include Aerospace electronics; Microwave devices, vacuum tubes, gas lasers and magnetrons; Heat sinks and spreaders for CPUs, lasers and power amplifiers.

Why it exists

Beryllium oxide combines high thermal conductivity with electrical insulation. Materion says it is the second highest thermal conductivity of any electrical insulator after diamond, nine times that of alumina, and up to 80 percent higher than aluminium nitride. The Frontiers review adds high-temperature radiation stability and high strength. The same properties make it attractive in electronics and reactors. The price is the toxicity of beryllium: the grade must be chosen with the dust hazard in mind.

Where it's used

Aerospace and defense electronics

Materion lists aerospace electronics as an application of its beryllium oxide ceramics. It also lists microwave devices, vacuum tubes, gas lasers and magnetrons among the uses of its BeO powder.

Heat spreaders and power packages

Wikipedia says BeO is used in heat sinks and spreaders for CPUs, lasers and power amplifiers, and in some power semiconductor packages between the chip and the mounting base.

Reactors and proposed space power

The Frontiers review describes BeO as a candidate reflector and moderator in reactors. Wikipedia says it has been proposed as a moderator for naval gas-cooled reactors and for NASA's Kilopower reactor for space applications. These are reactor and proposal uses, not flown ones.

Recipe

BeO (beryllium oxide)

BeO is beryllium oxide, with one beryllium atom bonded to one oxygen atom per formula unit . CIAAW 2024 standard atomic weights are 9.0122 for beryllium and 15.999 for oxygen. Commercial BeO is made by calcining beryllium hydroxide, carbonate or sulfate. PubChem says practically all commercial BeO is calcined at 1000 °C or higher ('high-fired'), and beryllium sulfate is calcined at carefully controlled temperatures to tailor its properties. Wikipedia also lists dehydration of the hydroxide and burning of the metal in air, which gives some beryllium nitride.

What BeO is made of
IngredientAtoms per unitShare of the weightWhat it does
Beryllium Be 1 36.0% Metal atom in each BeO formula unit
Oxygen O 1 64.0% Oxide anion in each BeO formula unit

Weight shares are calculated from standard atomic weights.

What it can do

Carry heat away

285 W/m°K

measured

Materion gives 285 W/m°K for Thermalox 995 (99.5% BeO). American Beryllia gives 285 W/mK at room temperature for an unnamed grade. Both are in the properties table.

Insulate electrically

American Beryllia calls BeO an electrical insulator with bulk resistivity on the order of 10 16 Ωcm. The exponent is lost in the printed text, so no number is entered.

Stay strong

221 Mpa

measured

Materion gives 221 MPa flexural strength for Thermalox 995. American Beryllia says BeO strength is normally lower than that of alumina.

How it compares

Materion says BeO is nine times more thermally conductive than alumina and up to 80 percent more than aluminium nitride, and that it is more chemically stable than AlN in oxidizing environments. Its density is 3.01 g/cm3 against 4.00 g/cm3 for alumina and 3.26 g/cm3 for AlN, both from American Beryllia. Its melting point of 2578 °C is from the CRC Handbook. The compared numbers come from different sources and grades, so they should be read as direction, not as exact ratios.

The same measurements for each material, so you can compare them. Each row names the key condition under the value; the full conditions and methods are in the numbered notes under Technical details. Other materials are shown beside it; each was measured under its own conditions, so open its page before comparing closely. Compare every grade in the family.

Benchmarks
MeasurementBeOAl2O3BaTiO3CaTiO3RCFCeO2CoO and Co3O4CuO, Cu2OHfO2Fe2O3, Fe3O4LSMPZTMgONiONb2O5Al2Si4O10(OH)2Ln2O3SiOMgO-SiO2SnO2, ITOTiO2WO3V2O5Y2O3ZnOMg-PSZ, ATZ, ZTAYSZ
Thermal behavior and safety
Melting point, beryllium oxide (CRC Handbook via PubChem)2578 °C42030 to 2072 °C1625 °C1975 °C1760 °C2600 °C1830 °C1326 °C2774 °Cno datano datano data2800 °C1984 °C1500 °Cno data2304 °C1702 °Cno data1630 °C1850 °C1472 °C690 °C2410 °C1975 °Cno datano data
Thermal conductivity, Thermalox 995 (Materion)Value from the Materion technical details table285 W/m°K30 W/(m·K)6 W/mKno data0.06 W/(m·K)no datano datano data1.5 W/mK5 to 10 W/m Kno datano data42 W/(m·K)no datano datano datano datano data2 W/(m·K)no datano datano datano data14.5 W/mK50 W/mK2.2 W/(m·K)2.2 W/(m·K)
Thermal conductivity, unnamed beryllium oxide (American Beryllia)Vendor statement, as printed285 W/mK30 W/(m·K)6 W/mKno data0.06 W/(m·K)no datano datano data1.5 W/mK5 to 10 W/m Kno datano data42 W/(m·K)no datano datano datano datano data2 W/(m·K)no datano datano datano data14.5 W/mK50 W/mK2.2 W/(m·K)2.2 W/(m·K)
Physical and electrical
Density, beryllium oxide (CRC Handbook via PubChem)3.01 g/cu cm13.72 g/cm³6.08 -4.1 g/cc64 kg/m37.65 g/cm³6.45 g/cm³6 -9.68 g/cc5.24 g/cm³2 g/cm³7.8 g/cm³3.58 g/cm³6.67 g/cm³4.6 g/cm³2.3 g/cc6.51 g/cm³2.13 g/cc2.8 g/cm³6.95 g/mL4 g/cm³7.2 g/cm³3.4 -> 4.9 g/cm³5.67 g/cm³5.72 g/cm³6.02 g/cm³
Density, beryllium oxide (Frontiers review, Table 1)3.01 g/cm³23.72 g/cm³6.08 -4.1 g/cc64 kg/m37.65 g/cm³6.45 g/cm³6 -9.68 g/cc5.24 g/cm³2 g/cm³7.8 g/cm³3.58 g/cm³6.67 g/cm³4.6 g/cm³2.3 g/cc6.51 g/cm³2.13 g/cc2.8 g/cm³6.95 g/mL4 g/cm³7.2 g/cm³3.4 -> 4.9 g/cm³5.67 g/cm³5.72 g/cm³6.02 g/cm³
Theoretical density, beryllium oxide (American Beryllia)3.01 g/cc33.72 g/cm³6.08 -4.1 g/cc64 kg/m37.65 g/cm³6.45 g/cm³6 -9.68 g/cc5.24 g/cm³2 g/cm³7.8 g/cm³3.58 g/cm³6.67 g/cm³4.6 g/cm³2.3 g/cc6.51 g/cm³2.13 g/cc2.8 g/cm³6.95 g/mL4 g/cm³7.2 g/cm³3.4 -> 4.9 g/cm³5.67 g/cm³5.72 g/cm³6.02 g/cm³
Other measurements
Flexural strength, Thermalox 995 (Materion)221 Mpa5379 MPano datano datano datano datano datano datano datano datano datano data7 MPano datano data400 MPano datano data190 MPano datano datano datano data180 MPano data900 MPa1240 MPa
Refractive index, beryllia (American Beryllia)Vendor optical properties list, as printed1.719 -6no data2.416 -no datano datano datano datano datano datano datano datano data1.708 -no data2.091 -no data1.93 -no datano datano datano datano datano data1.92 -no datano datano data
Band gap, beryllium oxide (Wikipedia infobox)10.6 eV7no datano datano datano datano datano data2.17 eV5.65 eVno datano datano datano data3.6 to 4 eVno datano datano datano datano data3.6 eV3.23 eVno datano datano data3.37 eVno datano data
Lattice constant a, beryllium oxide (wurtzite cell)2.698 Å8no datano datano datano datano datano data4.23 Åno datano datano datano datano data4.169 Åno datano datano datano datano datano data0.3785 nmno datano datano data3.25 Åno datano data
Lattice constant c, beryllium oxide (wurtzite cell)4.377 Å9no datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano data0.9515 nmno datano datano data5.207 Åno datano data
Solubility in water, beryllium oxide at 30 °C (CRC Handbook via PubChem)2 ug/100 mL10no datano datano datano datano data4.88 mg/Lno datano datano datano datano data86 mg/L3×10^-5 g/lno datano datano datano datano datano datano datano data0.8 g/100mlno datano datano datano data
Abbe number, beryllia (American Beryllia)93.25 -11no datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano datano data

Why choose it, and why not

Good for

  • Heat spreaders and packages that must move heat while staying electrically insulating, as in aerospace electronics and power packages.
  • Microwave, vacuum-tube, magnetron and gas-laser parts, as Materion lists them.

Watch out for

  • Beryllium dust is toxic and carcinogenic by inhalation. Handling needs dust control at every step.
  • Grade data differ. The Materion values are for Thermalox 995 only, and the American Beryllia values name no grade.
  • Electrical resistivity and thermal expansion are not entered, because the printed values lost their exponents.

Beryllium oxide is one of the best electrical insulators for conducting heat, and it suits electronics where aluminium nitride is not enough. Its toxicity is serious, so it suits only applications where the dust hazard can be controlled, and the grade should be checked on its own data sheet.

Technical details

For scientists and researchers. Everything above comes from the record below: every number with its method, its conditions and its source.

Other names and standards

The same grade under other systems, as datasheets and standards print them. Each code was checked against the page it comes from.

Other names and standards
SystemCodes
CAS1304-56-9
NameBeryllium oxide, Beryllia
Trade nameThermalox 995

Notes

The method, full conditions and any caveat for the numbered rows above.

Notes for the numbered rows
#MeasurementMethodConditionsCaveat
1Density, beryllium oxide (CRC Handbook via PubChem)Value from the CRC Handbook, 94th edition, as printed in the PubChem recordgrade beryllium oxide, no grade or purity statedtemperature 25 °C (printed beside the value)—
2Density, beryllium oxide (Frontiers review, Table 1)Table of moderator properties in an open-access reviewgrade beryllium oxide as a neutron moderator; no grade statedtemperature not stated—
3Theoretical density, beryllium oxide (American Beryllia)Vendor comparison of theoretical density values, as printedgrade unnamed beryllium oxide (vendor page does not name a grade)temperature not stated—
4Melting point, beryllium oxide (CRC Handbook via PubChem)Value from the CRC Handbook, 94th edition, as printed in the Wikipedia infobox (which cites Haynes p. 4.51)grade beryllium oxide, no grade or purity statedpressure atmospheric (standard)—
5Flexural strength, Thermalox 995 (Materion)Value from the Materion technical details table; test method not statedgrade Thermalox 995 (99.5% BeO, Materion)temperature not stated on the product page—
6Refractive index, beryllia (American Beryllia)—grade unnamed beryllium oxidewavelength not statedtemperature not stated—
7Band gap, beryllium oxide (Wikipedia infobox)Infobox value in Wikipedia; the source of the infobox figure is not given on the page readgrade beryllium oxide, wurtzite phasetemperature not statedThe vendor page gives a wurtzite phase band gap of 10.4 to 10.6 eV; the infobox value is the upper end of that range.
8Lattice constant a, beryllium oxide (wurtzite cell)Crystallographic value in the Wikipedia infobox, as printedcrystal hexagonal wurtzite-type celltemperature not stated—
9Lattice constant c, beryllium oxide (wurtzite cell)Crystallographic value in the Wikipedia infobox, as printedcrystal hexagonal wurtzite-type celltemperature not stated—
10Solubility in water, beryllium oxide at 30 °C (CRC Handbook via PubChem)Value from the CRC Handbook, 76th edition (1995 to 1996), as printed in the PubChem record; not a canonical property, so the name is a short snake_case namesolvent watertemperature 30 °C—
11Abbe number, beryllia (American Beryllia)Vendor optical properties list, as printed ("Vd = 93.25")grade unnamed beryllium oxidewavelength not stated—

Corrosion and compatibility

What happens when it meets other materials and environments.

Corrosion and compatibility
EnvironmentConcernWhat happens
Water low Very low solubility in water1
Concentrated sulfuric acid and fused potassium hydroxide severe Soluble in hot strong acid and fused alkali2
Oxidizing chemicals low More chemically stable than aluminium nitride in oxidizing environments3
Oxygen and hydrogen at high temperature low Very stable with O2 and H2 at 2000 °C4
Corrosion details
#EnvironmentDetailsTest conditions
1 Water The CRC Handbook figure in the PubChem record is 2 ug/100 mL at 30 °C. The PubChem record does not give a hydrolysis rate. Unlike aluminium nitride, no source read here says that water decomposes beryllium oxide. medium watertemperature 30 °C
2 Concentrated sulfuric acid and fused potassium hydroxide The CRC Handbook entry in PubChem says beryllium oxide is soluble in concentrated sulfuric acid and in fused potassium hydroxide. No rate, temperature or concentration is printed. medium concentrated sulfuric acid; fused potassium hydroxidetemperature not stated
3 Oxidizing chemicals Materion says BeO is more chemically stable than AlN ceramic in environments that contain oxidizing chemicals. No test data are given. —
4 Oxygen and hydrogen at high temperature The Frontiers review says BeO has a very stable performance with O2 and H2 even at a temperature of 2000 °C. The review gives no rate or test method. atmosphere oxygen and hydrogentemperature 2000 °C

Risks and side effects

Hazards to people, what happens when a cell overheats, and how the material is handled and stored.

For people

The hazard comes from dust, fume and mist. The fired solid is much less of a hazard, but PubChem's aggregate of ECHA reports classifies the compound as fatal if inhaled.

Inhalation
PubChem lists H330 (fatal if inhaled) and H350i (may cause cancer by inhalation), with H372 for organ damage from prolonged or repeated exposure.
Chronic disease
PubChem says repeated or prolonged exposure may cause chronic beryllium disease. Wikipedia names berylliosis, a chronic allergic-type lung disease.
Exposure limits
OSHA sets 0.2 µg/m3 as an 8-hour TWA and 2.0 µg/m3 as a 15-minute limit, with an action level of 0.1 µg/m3.

Fired parts

Once fired into a solid, the ceramic is safe to handle unless machining creates dust.

Machining
Wikipedia says crushing or grinding poses a risk, while clean breakage releases little dust.

If the part gets wet

Beryllium oxide is almost insoluble in water, and it dissolves only in strong acid or fused alkali.

Water
The CRC Handbook gives 2 ug/100 mL at 30 °C in water.
Acid and alkali
It is soluble in concentrated sulfuric acid and in fused potassium hydroxide, according to the CRC Handbook.

Hot oxidizing air

Beryllium oxide is chemically stable in oxygen and hydrogen.

Stability
The Frontiers review says BeO performs very stably with O2 and H2 even at 2000 °C. Materion says it is more chemically stable than AlN in oxidizing environments.

Test details
The original wording and numbers from the sources, for readers who want them.

Failure risks

Failure risks
FailureTrigger and consequence
Airborne beryllium from machining or crushing fired partshigh severityMachining, grinding or crushing of fired beryllium oxide that generates dustAirborne beryllium dust, which is the main inhalation hazard in the material's handling. Wikipedia says clean breakage releases little dust, but crushing or grinding can pose a risk.

Handling and storage

  • OSHA sets the beryllium permissible exposure limit at 0.2 µg/m3 as an 8-hour time-weighted average and 2.0 µg/m3 as a 15-minute short-term exposure limit. The action level is 0.1 µg/m3 as an 8-hour TWA.
  • Once fired into solid form, beryllium oxide is safe to handle if it is not machined to produce dust. Crushing or grinding poses a risk (Wikipedia).
  • Keep beryllium oxide powder and dust out of the air. PubChem's hazards summary warns that dust or fume inhalation may cause chemical pneumonitis.

Supply and geography

How common the raw materials are and where they come from.

Beryllium (feedstock for beryllium oxide)

USGS: identified world resources of beryllium are more than 100,000 tons, and about 60% of them are in the United States.

Top producers (2025)
United States 53.5%, Brazil 18.6%, China 17.9%, Nigeria 9.3%, Mozambique 0.7%
Recycling
USGS: recovered beryllium from new and old scrap may account for as much as 20% to 25% of total beryllium consumption.
Substitutes
USGS: aluminum nitride or boron nitride may be substituted for beryllium oxide.