Gallium oxide (beta-Ga2O3) Ga2O3

Ga2O3 (beta polymorph of gallium(III) oxide, two gallium atoms and three oxygen atoms per formula unit) · CAS 12024-21-4

Beta-gallium oxide (beta-Ga2O3) is an ultra-wide-bandgap semiconductor.

9 sources · Updated 2026-11-01 · CC BY 4.0

Evidence level

2 of 5

Lab-measured

Band gap

4.8 eV

Electron mobility

300 cm2/(V·s)

Thermal conductivity

10 to 30 W/mK

Recipe, share of the weight

  • Ga not statedGallium
  • O not statedOxygen

Best for

Power switching devices where a wide band gap of 4.8 eV and an estimated breakdown field of 8 MV/cm matter (per the 2019 review)

Weakest at

Thermal conductivity of 10 to 30 W/mK (Table 1 of the 2019 review, temperature not stated), and no space or radiation data in the sources read here

Risk at a glance

  • People No data. No hazard data recorded
  • If it fails No data. No failure risks recorded
  • Corrosion No data. No corrosion data recorded

Quick facts: Ga2O3

Key properties of Ga2O3
PropertyValueBasis
Density5.88 g/cm³1 sourced value
Thermal conductivity10 to 30 W/(m·K)4 sourced values across conditions

What is the density of Gallium oxide (beta-Ga2O3)?

Gallium oxide (beta-Ga2O3) has a density of 5.88 g/cm³. The source and test conditions are listed in the properties table on this page.

What is the thermal conductivity of Gallium oxide (beta-Ga2O3)?

Gallium oxide (beta-Ga2O3) has a thermal conductivity of 10 to 30 W/(m·K). The range covers 4 sourced values across the tempers, forms and test conditions the sources report; room-temperature values are used where a source states a temperature.

What is Gallium oxide (beta-Ga2O3) used for?

Uses recorded in the sources include Field-plated MOSFET (research device in the review); GOOI FET (research device in the review).

Why it exists

Beta-gallium oxide (beta-Ga2O3) is an ultra-wide-bandgap semiconductor. The 2019 review in Journal of Semiconductors gives a band gap of 4.8 eV and an estimated breakdown field of 8 MV/cm. Its Baliga figure of merit is printed as 3200 relative to silicon, which the review uses as a guide to power-device performance. The review also notes that melt-grown substrates could be lower cost. No space or radiation test is taken from the sources read here.

Where it's used

Power transistors (research devices)

The review reports a field-plated MOSFET with a breakdown voltage of 1850 V, and GOOI FETs with an on/off ratio of 10^10. These are laboratory devices described in the review, not commercial parts.

Recipe

Ga2O3 (beta polymorph of gallium(III) oxide, two gallium atoms and three oxygen atoms per formula unit)

Beta-Ga2O3 is gallium(III) oxide, a compound of two gallium atoms and three oxygen atoms. The 2019 review names the stable form beta-Ga2O3.

What Ga2O3 is made of
IngredientShare of the weightWhat it does
Gallium Ga not stated The metal cation in the oxide. The review gives no process route for the Ga2O3 crystal, so none is described here.
Oxygen O not stated Bonded to the gallium atoms in the oxide lattice. Oxygen content sets the stoichiometry of the compound.

Weight shares are as printed in the sources.

What it can do

Band gap

4.8 eV

measured

The review gives a band gap of 4.8 eV in Table 1. The abstract gives a range of 4.5 to 4.8 eV.

Electron mobility

300 cm2/(V·s)

measured

The review gives a carrier mobility of 300 cm2/(V·s) in Table 1. The abstract gives an intrinsic limit of 250 cm2/(V·s).

Thermal conductivity

10 to 30 W/mK

measured

Table 1 of the review gives a thermal conductivity of 10 to 30 W/mK, with no test temperature stated.

How it compares

Table 1 of the review also prints values for silicon, GaAs, 4H-SiC, GaN and diamond. Only the beta-Ga2O3 column is entered in this profile. The Baliga figure of merit relative to silicon is 3200 in Table 1 and more than 3000 in the abstract.

The same measurements for each material, so you can compare them. Each row names the key condition under the value; the full conditions and methods are in the numbered notes under Technical details. Compare every grade in the family.

Benchmarks
MeasurementGa2O3
Thermal behavior and safety
Thermal conductivity, beta-Ga2O3 (range)Range printed in Table 1 of the review10 to 30 W/mK
Thermal conductivity, beta-Ga2O3 along [100], room temperature10.9 W/mK12
Thermal conductivity, beta-Ga2O3 along [010], room temperature27 W/mK13
Thermal conductivity, beta-Ga2O3 along [100], room temperature, 3 omega method13 W/mK14
Physical and electrical
Relative density, gallium(III) oxide powder5.88 g/mL8
Other measurements
Band gap, beta-Ga2O34.8 eV1
Critical (breakdown) electric field, beta-Ga2O38 MV/cm2
Intrinsic electron mobility limit, beta-Ga2O3Value printed in the abstract of the review250 cm²/(V·s)3
Carrier mobility, beta-Ga2O3Value printed in Table 1 of the review300 cm²/(V·s)4
dielectric constant11 -5
Saturation velocity, beta-Ga2O32 10^7 cm/s6
Baliga figure of merit relative to siliconRatio printed in Table 1 of the review3200 -7
Johnson figure of merit relative to silicon, beta-Ga2O32844 -9
Baliga high-frequency figure of merit relative to silicon, beta-Ga2O3142 -10
Keyes figure of merit relative to silicon, beta-Ga2O30.2 -11

Why choose it, and why not

Good for

  • Power switching where a 4.8 eV band gap and an estimated 8 MV/cm breakdown field matter, per the 2019 review.
  • Power device research where the review's Baliga figure of merit, 3200 relative to silicon, is the target.

Watch out for

  • Thermal conductivity of 10 to 30 W/mK in Table 1, with no test temperature stated.
  • The review's abstract and Table 1 disagree on electron mobility, 250 against 300 cm2/(V·s).
  • Most device figures in the review are for laboratory devices, not production parts.

Beta-Ga2O3 has a wide band gap of 4.8 eV and an estimated breakdown field of 8 MV/cm in the 2019 review. This profile has no corrosion, radiation or space data, so no space verdict is possible from it.

Technical details

For scientists and researchers. Everything above comes from the record below: every number with its method, its conditions and its source.

Notes

The method, full conditions and any caveat for the numbered rows above.

Notes for the numbered rows
#MeasurementMethodConditionsCaveat
1Band gap, beta-Ga2O3Value printed in Table 1 of an open-access review of gallium oxide power devicespolymorph beta-Ga2O3temperature not statedThe abstract of the same review gives a range of 4.5 to 4.8 eV, so the value depends on the source.
2Critical (breakdown) electric field, beta-Ga2O3Estimated value printed in the abstract and in Table 1 of the review; not a measured breakdown testpolymorph beta-Ga2O3basis described as estimated in the abstract; no test condition given—
3Intrinsic electron mobility limit, beta-Ga2O3—polymorph beta-Ga2O3basis intrinsic limit, as printed in the abstractTable 1 of the same review gives a carrier mobility of 300 cm2/(V·s), so the abstract and table disagree. Both values are kept.
4Carrier mobility, beta-Ga2O3—polymorph beta-Ga2O3temperature not statedThe abstract gives an intrinsic limit of 250 cm2/(V·s), which differs from this table value.
5dielectric constantValue printed in Table 1 of the review (dimensionless)polymorph beta-Ga2O3temperature not stated—
6Saturation velocity, beta-Ga2O3Value printed in Table 1 of the review, in the unit the table printspolymorph beta-Ga2O3temperature not stated—
7Baliga figure of merit relative to silicon—polymorph beta-Ga2O3basis ratio to silicon, where silicon equals 1; not an absolute figuretemperature not statedThe abstract describes this figure of merit as more than 3000 relative to silicon, which is consistent with the table value.
8Relative density, gallium(III) oxide powderRelative density printed in Section 9.1 of the supplier SDS; a supplier value for the powder, not a crystal measurementform powder, white (Aldrich product 215066)temperature 25 °CThe SDS gives 5.88 g/mL for the powder. No density for a single beta-Ga2O3 crystal is printed in any source read in this run.
9Johnson figure of merit relative to silicon, beta-Ga2O3Ratio printed in Table 1 of the review, Johnson FOM rowpolymorph beta-Ga2O3basis ratio to silicon, where silicon equals 1temperature not stated—
10Baliga high-frequency figure of merit relative to silicon, beta-Ga2O3Ratio printed in Table 1 of the review, Baliga High Frequency FOM rowpolymorph beta-Ga2O3basis ratio to silicon, where silicon equals 1temperature not stated—
11Keyes figure of merit relative to silicon, beta-Ga2O3Ratio printed in Table 1 of the review, Keyes FOM rowpolymorph beta-Ga2O3basis ratio to silicon, where silicon equals 1temperature not stated—
12Thermal conductivity, beta-Ga2O3 along [100], room temperatureTime-domain thermoreflectance on single crystals; value printed in the abstractpolymorph beta-Ga2O3direction [100]temperature room temperaturePrinted as 10.9 ± 1.0 W/mK. The ± 1.0 is the uncertainty the paper prints.
13Thermal conductivity, beta-Ga2O3 along [010], room temperatureTime-domain thermoreflectance on single crystals; value printed in the abstractpolymorph beta-Ga2O3direction [010]temperature room temperaturePrinted as 27.0 ± 2.0 W/mK. The ± 2.0 is the uncertainty the paper prints.
14Thermal conductivity, beta-Ga2O3 along [100], room temperature, 3 omega methodElectrical 3 omega method on bulk crystals; value printed in the abstractpolymorph beta-Ga2O3direction [100]temperature room temperaturecrystal Czochralski-grown bulk crystals, Mg-doped and undopedPrinted as 13 ± 1 W/mK, the uncertainty the paper prints. It is a second method on a different crystal set from the TDTR values above.

Risks and side effects

Hazards to people, what happens when a cell overheats, and how the material is handled and stored.

For people

Two supplier safety data sheets for gallium(III) oxide disagree. The Aldrich sheet (product 215066) lists no classification, and the ChemicalBook sheet prints the hazard statements H315, H319 and H335.

Check the supplier sheet
PubChem returned a reCAPTCHA page and American Elements returned an access error. Check the safety data sheet for the lot you handle before handling powder or wafers.

Test details
The original wording and numbers from the sources, for readers who want them.

Failure risks

Failure risks
FailureTrigger and consequence
Reaction with strong oxidizing agentsContact with strong oxidizing agents, which the Aldrich SDS lists as incompatibleThe SDS gives no reaction products or rates: reactivity and hazardous reactions are 'no data available'.
FireExposure to a fireThe SDS says the product does not burn and lists gallium oxides as the special fire hazard. Flash point is 'not applicable'.

Handling and storage

  • Aldrich SDS: provide exhaust ventilation where dust forms, avoid dust formation, keep the container tightly closed in a dry and well-ventilated place, and do not let the product enter drains. Wear gloves and eye protection.

Supply and geography

How common the raw materials are and where they come from.

Gallium (the metal from which Ga2O3 is made)

Average gallium content of bauxite is 50 parts per million (USGS, World Resources)

Top producers (2025)
China 99%
Critical mineral lists
US: listed, EU: listed
Recycling
USGS: old scrap none. Substantial new scrap from GaAs device manufacture is reprocessed to recover high-purity gallium at one facility in New York.

Updated