Silicon-germanium alloy SiGe

Si1-xGex, a silicon-germanium alloy in any ratio

SiGe is an alloy of silicon and germanium, written Si1-xGex, and it can be made in any ratio of the two (Wikipedia).

11 sources · Updated 2026-10-26 · CC BY 4.0

Evidence level

2 of 5

Lab-measured

Thermoelectric figure of merit

0.75 at 1000 K

Hot junction

1089 to 1255 K

Density in a weight model

4.31 g/cm3

Recipe, share of the weight

  • Si 80%Silicon
  • Ge 20%Germanium

Best for

High-temperature thermoelectric legs for radioisotope generators, and SiGe transistors for fast RF chips

Weakest at

Thermoelectric efficiency: NASA says the figure of merit of Si-Ge is much lower than that of lead telluride

Risk at a glance

  • People Low. Low toxicity for germanium; no SiGe SDS
  • If it fails Moderate. Grain growth in nanostructured SiGe
  • Corrosion Low. NASA says SiGe is stable in air or vacuum at high temperature.

Quick facts: SiGe

Key properties of SiGe
PropertyValueBasis
Density4.31 g/cm³1 sourced value

What is the density of Silicon-germanium alloy (SiGe)?

Silicon-germanium alloy (SiGe) has a density of 4.31 g/cm³. The source and test conditions are listed in the properties table on this page.

What is Silicon-germanium alloy (SiGe) used for?

Uses recorded in the sources include SiGe heterojunction bipolar transistors (HBTs) in RF and mixed-signal chips; SiGe strain layer in CMOS transistors; Radioisotope thermoelectric generators (MHW-RTG and GPHS-RTG; a power source, not a battery).

Why it exists

SiGe is the thermoelectric alloy used for deep-space radioisotope generators. NASA calls it a popular choice because it is high-temperature, mechanically robust and stable in air or vacuum. Alloying silicon with germanium scatters phonons and lowers lattice conductivity, which is the reason for the alloy. Its figure of merit is lower than that of lead telluride, but it tolerates hotter hot junctions. The same silicon-germanium material system is used in SiGe HBT transistors.

Where it's used

Radioisotope generators

MHW-RTG units with SiGe couples flew on Voyager 1 and 2, and GPHS-RTG units with the same SiGe technology flew on Galileo, Ulysses, Cassini and New Horizons (Wikipedia).

SiGe transistors

IHP presented a SiGe HBT with fT/fmax of 505 GHz/720 GHz at IEDM 2016. Wikipedia says the HBTs let CMOS logic be integrated into mixed-signal circuits.

Strain layers in CMOS

Wikipedia says SiGe is used as a strain-inducing layer for CMOS transistors.

Recipe

Si1-xGex, a silicon-germanium alloy in any ratio; the thermoelectric composition in the sources read is Si80Ge20

SiGe is an alloy of silicon and germanium in any molar ratio, written Si1-xGex (Wikipedia). The RTG thermoelectric material in the NASA report is Si1-xGex, doped with boron for p-type and with phosphorus for n-type. The 2023 paper's p-type composition is Si80Ge20B2. NASA's report describes powder processing with spark plasma sintering. Traditional samples were solidified and homogenized by zone-levelling (NASA report, citing Dismukes 1964).

What SiGe is made of
IngredientShare of the weightWhat it does
Silicon Si 80% Host lattice of the alloy. Phonon scattering from the Si and Ge mass difference lowers lattice conductivity (NASA report, citing Abeles).
Germanium Ge 20% Alloying element. Its share is the Si80Ge20 composition of the 2023 paper; the alloy is made in any Si-Ge ratio (Wikipedia).

Weight shares are as printed in the sources.

What it can do

Thermoelectric figure of merit

0.75 at 1000 K

measured

A p-type Si80Ge20B2 sample reached zT of 0.75 at 1000 K, and 0.8 with 4 wt% MnTe (Ivanova et al., 2023).

Hot junction

1089 to 1255 K

measured

NASA's 1968 study used SiGe hot junctions of 1089 K and 1255 K in its generator designs.

Density in a weight model

4.31 g/cm3

measured

NASA's 1968 weight model used 4.31 g/cm3 for Si-Ge elements, against a higher value for lead telluride. The value is a model input, not a measurement.

How it compares

The NASA 1968 study says lead telluride has a higher figure of merit than Si-Ge, but a much higher density than Si-Ge (4.31 g/cm3), and it chose Si-Ge for generators with hotter hot junctions (1089 to 1255 K against 811 K for lead telluride). Against germanium on its own, the sources read here give no direct comparison of thermoelectric behaviour.

The same measurements for each material, so you can compare them. Each row names the key condition under the value; the full conditions and methods are in the numbered notes under Technical details. Other materials are shown beside it; each was measured under its own conditions, so open its page before comparing closely. Compare every grade in the family.

Benchmarks
MeasurementSiGeSiGeAsB
Physical and electrical
Density assumed for Si-Ge elements in a generator weight modelValue stated in a NASA Lewis analysis4.31 g/cm³52.328 g/cm³5.327 g/cm³5727 kg/m32.35 g/cm³
Temperature behavior
Hot-junction temperature, SiGe stage of a 1968 generator study1089 to 1255 K4no datano datano datano data
Hot-junction temperature, MHW-RTG SiGe couplesValue printed on a reference page (Wikipedia)1273 Kno datano datano datano data
Cold-junction temperature, MHW-RTG SiGe couplesValue printed on a reference page (Wikipedia)573 Kno datano datano datano data
Other measurements
Thermoelectric figure of merit, p-type Si80Ge20B2Value printed in the paper abstract0.75 -no datano datano datano data
Thermoelectric figure of merit, Si80Ge20B2 with 4 wt% MnTeValue printed in the paper abstract0.8 -no datano datano datano data
Thermoelectric figure of merit, p-type SiGe (up to)0.7 -1no datano datano datano data
Thermoelectric figure of merit, n-type SiGe (up to)1 -2no datano datano datano data
Seebeck coefficient, p-type Si80Ge20B2 (first value in abstract)252 uV/K3no datano datano datano data
Seebeck coefficient, p-type Si80Ge20B2 with 4 wt% MnTe (second value in abstract)Value printed in the paper abstract197 uV/Kno datano datano datano data

Why choose it, and why not

Good for

  • High-temperature thermoelectric legs. NASA and Wikipedia report SiGe couples in RTGs with hot junctions of 1089 to 1273 K.
  • Fast RF transistors. IHP reports a SiGe HBT with fT/fmax of 505 GHz/720 GHz.

Watch out for

  • Figure of merit: zT is about 0.75 at 1000 K for the p-type sample read, and NASA says it is much lower than lead telluride.
  • Germanium supply: about 20 percent of a Si80Ge20 alloy is germanium, and USGS reports high US import reliance.
  • Grain growth at high temperature can erase the gain from nanostructuring.

SiGe is well established as a high-temperature thermoelectric alloy for deep-space radioisotope generators, and as the base of SiGe transistors for fast RF chips. Ten values are sourced here, covering zT, Seebeck coefficient, junction temperatures and one design density. Thermal conductivity, melting point and density at a stated composition were not found as printed values in the pages read, and no SiGe-specific hazard data were read.

Technical details

For scientists and researchers. Everything above comes from the record below: every number with its method, its conditions and its source.

Notes

The method, full conditions and any caveat for the numbered rows above.

Notes for the numbered rows
#MeasurementMethodConditionsCaveat
1Thermoelectric figure of merit, p-type SiGe (up to)Value printed on a reference page (Wikipedia); zT is dimensionless and no unit is printedtemperature 1000 °Cbound up to, as printed—
2Thermoelectric figure of merit, n-type SiGe (up to)Value printed on a reference page (Wikipedia); zT is dimensionless and no unit is printedtemperature 1000 °Cbound up to, as printed—
3Seebeck coefficient, p-type Si80Ge20B2 (first value in abstract)Value printed in the paper abstract; the abstract reads it as a fall from 252 to 197 when MnTe is addedcomposition Si80Ge20B2, pristine, p-typetemperature 1000 K—
4Hot-junction temperature, SiGe stage of a 1968 generator studyValues stated in a NASA Lewis parametric analysis (the study gives 811 K for lead telluride)basis design hot-junction temperatures in a parametric study, not measured material limitsDesign temperatures for a generator model. The property name hot_junction_temperature is not in the canonical list (see gaps).
5Density assumed for Si-Ge elements in a generator weight model—basis input to a 1968 weight model, not a measurementcomposition not statedThe study used this value for weight only. The Ioffe density fit for Si1-xGex gives a lower value at x = 0.2 (about 3.0 g/cm3 by arithmetic), so do not treat 4.31 as a measured density.

Corrosion and compatibility

What happens when it meets other materials and environments.

Corrosion and compatibility
EnvironmentConcernWhat happens
Air or vacuum at high temperature (RTG operation) low NASA says SiGe is stable in air or vacuum at high temperature.1
Dry oxygen at 850 to 1000 °C (thermal oxidation of Si1-xGex, x = 0.13) not rated Ge atoms are pushed out of the oxide at the interface and do not enter the oxide layer.2
Wet and dry oxidation at high temperature not rated Wet oxidation of SiGe is faster than for Si, while dry oxidation is about equal or slightly faster.3
Corrosion details
#EnvironmentDetailsTest conditions
1 Air or vacuum at high temperature (RTG operation) The NASA report lists SiGe as a popular RTG choice for high temperature, mechanically robust, stable in air or vacuum, with reasonable ZT. No oxidation rate, mass change or temperature limit is given. basis qualitative statement in the source; no rate or temperature number printed
2 Dry oxygen at 850 to 1000 °C (thermal oxidation of Si1-xGex, x = 0.13) The Osaka study of a fully strained Si0.87Ge0.13 layer on Si oxidized in dry O2 at 850 to 1000 °C. Ordered SiO2 formed, and the authors describe the characteristic of SiGe oxidation as the ejection of Ge atoms from the interface between the surface oxide and the SiGe layer, without their incorporation into the oxide layer. x 0.13oxidant dry O2temperature 850 to 1000 °C
3 Wet and dry oxidation at high temperature The Osaka paper's introduction says that SiGe oxidation is faster than that of Si under wet oxidation conditions, but almost equal or slightly higher under dry oxidation. No rate constants are given in the text read. basis literature summary in the introduction of the Osaka paper; no rate number read

Risks and side effects

Hazards to people, what happens when a cell overheats, and how the material is handled and stored.

For people

The only SDS read is for germanium (1989), and it gives low toxicity. No SDS for the SiGe alloy was read.

Germanium SDS
The 1989 SDS says germanium is considered to be of low toxicity and may be a mild skin irritant. Inhalation effects are unknown.
Handling
Avoid heating germanium with bromine, chlorine, fluorine, oxygen or potassium chlorate, per the same SDS.

If it fails

The failure routes in the sources are grain growth at high temperature and germanium supply.

Heat
NASA says thermally induced grain growth can hinder nanostructured SiGe, because the ZT gain from small grains is lost.
Supply
USGS reports that US imports of germanium metal fell 67 percent in 2025, to an estimated 7,000 kg, after China's ban on exports to the United States in 2024.

Test details
The original wording and numbers from the sources, for readers who want them.

Failure risks

Failure risks
FailureTrigger and consequence
Grain growth in nanostructured SiGemoderate severityLong operation at high temperatureNASA says thermally induced grain growth can hinder the practical use of nano-sized SiGe grains, because the ZT gain from small grains is lost as the grains grow.
Germanium supply interruptionmoderate severityChina's ban on germanium exports to the United States in 2024USGS reports that US imports of germanium metal fell 67 percent in 2025 to an estimated 7,000 kg, and that net import reliance was above 50 percent in every year from 2021 to 2025e. Germanium is about 20 percent of a Si80Ge20 alloy, so germanium supply sets the cost and availability of the alloy, while silicon is far more abundant.

Handling and storage

  • The germanium SDS lists germanium as a material that fractures mechanically, so SiGe wafers and ingots should be handled as brittle solids.
  • The germanium SDS lists incompatibilities with bromine, chlorine, fluorine, oxygen and potassium chlorate when germanium is heated.

Supply and geography

How common the raw materials are and where they come from.

Silicon (about 80 percent of a Si80Ge20 alloy)

The USGS silicon chapter gives no crustal abundance figure. It says world and domestic resources for making silicon metal are abundant.

Top producers (2025)
China 80%
Critical mineral lists
US: listed
Recycling
USGS silicon chapter: recycling is insignificant.
Substitutes
USGS: gallium arsenide and germanium are the principal substitutes for silicon in semiconductor and infrared applications.

Germanium (about 20 percent of a Si80Ge20 alloy)

No abundance figure was read in the germanium chapter. It says resources are linked to zinc and lead-zinc-copper sulfide ores, and that reserves were not widely reported.

Recycling
USGS: much germanium removed in machining infrared optics is routinely recycled as new scrap, and germanium wafers used as solar-cell substrates are recycled. The USGS says the information available was inadequate for reliable estimates of secondary germanium.
Substitutes
USGS: silicon or gallium arsenide substitute for germanium in certain electronic applications.